Electrical conductivity of nanocrystalline ceria and zirconia thin films

The results of studies of the preparation, structure and electrical conduct ivity of ZrO2:16% Y and CeO2 thin films are presented. Dense films with gra in size controlled in the region of 1-400 nm have been obtained on monocrys talline sapphire and polycrystalline Al2O3, substrates using a polymeric pr ecursor spin coating method. The electrical conductivity of nanocrystalline thin films has been studied as a function of oxygen activity and temperatu re and correlated with the microstructure. Nanocrystalline specimens are ch aracterized by enhanced electrical conductivity and different stoichiometry compared with microcrystalline material. (C) 2000 Elsevier Science B.V. Al l rights reserved.