Twist filter for the removal of macroparticles from cathodic arc plasmas

Cathodic are plasmas are known to be contaminated with macroparticles. A va riety of magnetic plasma filters have been used with various success in rem oving the macroparticles from the plasma. In this publication, an open-arch itecture, double-bent filter that is twisted ('Twist Filter(TM)) is describ ed. A cathodic are plasma deposition system was designed around this novel, very compact and efficient filter. Its major application is the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage in dustry. (C) 2000 Elsevier Science B.V. All rights reserved.