The effects of metal ion post-implantation on the near surface properties of TiN deposited by CVD

In contrast to the effect of non-metal ion implantation where changes in pr operties are related to the chemical and tribological character of the impl anted zone, metal ion implantation hardens the substrate and enhances wear resistance to depths well beyond that zone. In the present work the surface properties of TiN deposited by chemical vapor deposition (CVD) and subject ed to a metal ion implantation post-treatment: surface topography, friction al properties and residual stress are studied. It is found that the residua l stress becomes increasingly compressive with increasing ion energy, with a slight concomitant fall in the coefficient of friction; neither the surfa ce roughness nor the surface topography is affected. The data support the m odel, presented earlier, which proposes that defects, including dislocation s, are generated in the surface by the implantation process and lead to the development of a work-hardened zone below the surface that enhances wear r esistance. (C) 2000 Elsevier Science B.V. All rights reserved.