Properties of (Ti,Al)N coatings deposited by the magnetic filter cathodic arc

Citation
Ms. Leu et al., Properties of (Ti,Al)N coatings deposited by the magnetic filter cathodic arc, SURF COAT, 133, 2000, pp. 319-324
Citations number
12
Categorie Soggetti
Material Science & Engineering
Journal title
SURFACE & COATINGS TECHNOLOGY
ISSN journal
02578972 → ACNP
Volume
133
Year of publication
2000
Pages
319 - 324
Database
ISI
SICI code
0257-8972(200011)133:<319:PO(CDB>2.0.ZU;2-K
Abstract
A newly devised magnetic solenoid filter retrofitted in the cathodic are pl ating system demonstrates that it can effectively reduce the number and siz e of the numerous macroparticles that are usually present on the surface of the coatings deposited by the conventional cathodic are plating system. Ho wever, the magnetic solenoid filter tends to alter the composition and prop erties of the coating deposited. The (Ti,AI)N coatings produced were evalua ted in terms of surface properties, color dispersion, elemental content and oxidation behavior. The properties derived for the coatings were categoriz ed according to the position of the coating specimens with respect to the c entral axis of the target. It was found that the properties of the coatings deposited in this system are symmetric about the central axis of the cylin drical target. In other words, specimens located along the central axis of the cylindrical target were found to be higher in Ti content (28 at.%) and lower in Al content (19 at.%). By comparing the elemental content with the results of colorimetry analysis for the coatings, it was found that the col or of the coating is blacker and greener when Al content is higher, and is whiter and redder when the Ti content is higher. The result of thermogravim etry shows an improved oxidation resistance for the coatings having higher Al contents. (C) 2000 Elsevier Science B.V. Al rights reserved.