Effect of sputtering parameters on Ta coatings for gun bore applications

Citation
Dw. Matson et al., Effect of sputtering parameters on Ta coatings for gun bore applications, SURF COAT, 133, 2000, pp. 411-416
Citations number
19
Categorie Soggetti
Material Science & Engineering
Journal title
SURFACE & COATINGS TECHNOLOGY
ISSN journal
02578972 → ACNP
Volume
133
Year of publication
2000
Pages
411 - 416
Database
ISI
SICI code
0257-8972(200011)133:<411:EOSPOT>2.0.ZU;2-G
Abstract
Tantalum offers a number of attractive properties for gun bore coating appl ications, including a high melting temperature, high ductility, and an envi ronmentally friendly deposition method. However, vapor-deposited tantalum c an appear in both the characteristic bcc phase found in the bulk material, and in a very brittle and less desirable 'beta' phase. Presence of the beta phase in bore coatings is considered undesirable because of its brittlenes s and resulting failure as the coating is stressed. A high-rate triode sput tering system with a cylindrical coating geometry was used to produce thick tantalum coatings on 4340 steel smooth bore cylindrical substrates. A syst ematic series of tests were performed to evaluate the effects of sputtering gas species (Ar, Kr, Xe) and substrate temperature (100-300 degreesC) duri ng deposition on the phase and microstructure of the coatings. Heavier sput tering gases and higher substrate temperatures were found to promote the fo rmation of bcc-phase tantalum coatings. Use of a movable target assembly wa s shown to promote the production of dense, single-phase tantalum coatings. (C) 2000 Elsevier Science B.V. All rights reserved.