Silicon carbide films between 2.3 and 3.0 mum were deposited on ATSI 304 st
ainless steel (SS), carbon steel (CS) and crystalline silicon from a SiC ta
rget in a magnetron sputtering system. Good mechanical properties were obta
ined for the films by carefully controlling the deposition parameters. Resu
lts of scratch tests revealed that adhesion of the films is a function of d
eposition parameters and substrate type. Additionally, an influence of subs
trate preparation prior to deposition was also observed. Critical loads of
20 N, 8 N and 5 N were obtained in case of Si, SS and CS substrates, respec
tively. Vickers micro-hardness values were between 10 and 30 GPa, films on
SS being harder than films on CS. The behavior of the fil;ns as corrosion p
rotection barriers in aggressive environments was evaluated by immersion te
sts and electrochemical impedance spectroscopy measurements. Films on SS ex
hibited a better corrosion resistance than those on CS. Their adhesion to t
he SS was outstanding, even after a long time of immersion in a HCl 0.8 M s
olution, showing that they are efficient protection barriers. The corrosion
process of the substrates starts at micro-pores present in the films so th
at corrosion pits all over the surface of the samples can be observed. (C)
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