The use of magnetron arrays for depositing large-area oxide coatings

The application of coatings over large areas can be approached through the use of large deposition sources. A versatile alternative, e.g. to long rect angular magnetrons, are linear arrays of circular planar magnetrons to proc ess coatings over wide path lengths. We investigate the feasibility of usin g a linear array of 76-mm-diameter magnetron sources operated in the rf mod e to deposit oxide target materials across a path in excess of 0.7 m wide. Specific results are given for the case of a 2-mum-thick alumina coating. ( C) 2000 Elsevier Science B.V. All rights reserved.