Raman study of free-standing diamond films and coatings deposited on tungsten carbide tools prepared by hot-filament CVD method

Hot-filament chemical vapor deposition (HFCVD) method is presented to prepa re i) freestanding diamond films using Si (100) mirror-polished substrate a nd ii) diamond coatings deposited on WC/Co cutting plates. Both diamond fil ms and coatings have been prepared with high quality as has been shown an a nalysis by micro-Raman spectroscopy. Raman spectra also have showed similar structure for both deposited films and coatings, respectively. We have fou nd the almost same of position of a luminescence peak in the diamond coatin g as in the free-standing diamond film. A method is proposed for evaluation of relatively concentration of luminescence centers in the film. A discuss ion is considered about structure of such centers.