V. Malcher et al., Raman study of free-standing diamond films and coatings deposited on tungsten carbide tools prepared by hot-filament CVD method, ACT PHYS SL, 50(6), 2000, pp. 673-678
Hot-filament chemical vapor deposition (HFCVD) method is presented to prepa
re i) freestanding diamond films using Si (100) mirror-polished substrate a
nd ii) diamond coatings deposited on WC/Co cutting plates. Both diamond fil
ms and coatings have been prepared with high quality as has been shown an a
nalysis by micro-Raman spectroscopy. Raman spectra also have showed similar
structure for both deposited films and coatings, respectively. We have fou
nd the almost same of position of a luminescence peak in the diamond coatin
g as in the free-standing diamond film. A method is proposed for evaluation
of relatively concentration of luminescence centers in the film. A discuss
ion is considered about structure of such centers.