Ga K-edge x-ray absorption measurements were employed to investigate Mg-dop
ing effects in GaN samples. Strong polarization-dependent x-ray absorption
near-edge structures become less pronounced with increasing doping concentr
ation, indicating the formation of a mixing-phase structure of cubic and he
xagonal phases. Analysis of the extended x-ray absorption region of the spe
ctra revealed doping-related defects such as vacancies, substitutions, and
interstitial occupations. They were formed anisotropically in the crystal c
axis direction and its perpendiculars. Disorderliness arising from phase m
ix and defects is believed to have lowered the Debye temperature of the dop
ed GaN films and caused the destructive interference of the absorption fine
-structure oscillation functions. These effects were taken into account for
the observed large coordination number reductions in our samples. (C) 2001
American Institute of Physics.