Lamb wave devices using capacitive micromachined ultrasonic transducers

Citation
Gg. Yaralioglu et al., Lamb wave devices using capacitive micromachined ultrasonic transducers, APPL PHYS L, 78(1), 2001, pp. 111-113
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
78
Issue
1
Year of publication
2001
Pages
111 - 113
Database
ISI
SICI code
0003-6951(20010101)78:1<111:LWDUCM>2.0.ZU;2-2
Abstract
Lamb wave devices based on capacitive micromachined ultrasonic transducers (CMUTs) have been built on 500-mum-thick silicon wafers for frequencies in the vicinity of 1 MHz. CMUTs have been used to both excite and detect Lamb waves in the substrate. This configuration eliminates the need for piezoele ctric materials, which are not compatible with the existing integrated circ uit (IC) fabrication techniques, and allows easy integration of Lamb wave d evices and electronics on the same wafer. Finite element analysis of the de vices shows that the lowest order antisymmetric Lamb wave (A(0)) is the dom inant mode in the substrate in this frequency range. This result is also co nfirmed by demonstration experiments. (C) 2001 American Institute of Physic s.