Cc. Watson et Wk. Chan, High-spatial-resolution semiconductor characterization using a microwave eddy current probe, APPL PHYS L, 78(1), 2001, pp. 129-131
We report on the design and application of a high-resolution microwave eddy
current probe that consists of a microfabricated coil with inner and outer
widths of 6 and 20 mum, respectively, integrated with a coplanar waveguide
. In addition to improved spatial resolution, we implement a stub-matching
technique, which enables us to make high-sensitivity measurements. We demon
strate the utility of our device by measuring the minority-carrier lifetime
in a thin In0.53Ga0.47As film. Although our present demonstration does not
allow us to reuse the sample, with minor changes this technique can be mad
e noncontact and nondestructive. (C) 2001 American Institute of Physics.