SiGe alloy quantum dots with spherical shape have been synthesized by the t
hermal evaporation method. The shape and structure of these dots have been
investigated. Transmission electron microscopy images show that they have a
n average diameter of about 15 nm, and their cores are crystalline. The com
position of these dots could be extracted from the Raman peak position of t
he silicon TO phonon. (C) 2000 American Institute of Physics. [S0003- 6951(
00)02752-2].