A series of BaTiO3-x (x=0, 0.07, 0.18, and 0.48) thin films with c-axis ori
ented tetragonal perovskite structures were epitaxially grown on SrTiO3 (10
0) and MgO (100) substrates by laser molecular-beam epitaxy under various o
xygen pressures. The electrical conductivity of the deposited thin films in
creases with decreasing the oxygen pressure. A metallic conduction is obser
ved in the oxygen most deficient BaTiO2.52 thin film whose oxygen content (
2.52) and electrical resistivity (6.0x10(-5) Omega cm) are both the minimum
values among literature. An optical absorption peak is observed in each ox
ygen deficient BaTiO3-x thin film. The peak position shifts to lower energy
, and the peak width becomes larger with decreasing the oxygen pressure. Th
e influence of oxygen pressure on the electrical and optical properties in
the reduced BaTiO3-x thin films is discussed. (C) 2000 American Institute o
f Physics. [S0003- 6951(00)01352-8].