We have observed a scanning tunneling microscopy (STM) induced lateral tran
sfer of a single hydrogen atom on the Si(100) surface. The transfer rate of
the hydrogen atom is proportional to the electron dose, indicating an elec
tron-assisted transfer mechanism. Measurements of the relations between the
transfer rate and the sample bias and temperature give further support for
an electronic mechanism. The bias dependence of the transfer rate shows a
peak, and from a first principles electronic structure calculation we show
that the position of the peak is related to the energy of a localized surfa
ce resonance. We propose that the hydrogen transfer is related to inelastic
hole scattering with this surface resonance. We develop a microscopic mode
l for the hydrogen transfer, and using the experimental data we extract inf
ormation on the resonance lifetime and the transfer yield per resonant elec
tron. The transfer takes place by tunneling through a small excited state t
ransfer barrier. The transfer rate is increased if the hydrogen atom before
the resonant excitation is vibrationally excited, and this gives rise to a
n increasing transfer rate with increasing sample temperature.