X-ray diffraction analysis of texture and stresses in carbon-doped chromium coatings produced by magnetron cathodic sputtering

Vapor deposited chromium doped carbon thin films are highly fiber textured and their major orientation depends on the growth parameters and in particu lar, on the substrate bias voltage. The strong texture does not allow to ap ply the well known sin(2)psi, - method stress determination technique using X-ray. Two methods will be used and compared : the Ideal Directions Method and the Single Crystal Stress Analysis. The growth parameters effect will be studied with different X-ray techniques. The fiber texture presents an i nclination in connection with the columnar morphology and the substrate pos ition according to the long target axis. The growth parameters such as the substrate bias voltage and the target power have a strong influence on the residual stress distribution.