Water, like any polarizable medium, responds to a nonuniform electric field
by collecting preferentially in regions of maximum field intensity. This m
anifestation of dielectrophoresis (DEP) makes possible a variety of microel
ectromechanical liquid actuation schemes. In particular, we demonstrate a n
ew class of high-speed DEP actuators, including "wall-less" flow structures
, siphons, and nanodroplet dispensers that operate with water. Liquid in th
ese microfluidic devices rests on a thin, insulating, polyimide layer that
covers the coplanar electrodes. Microliter volumes of water, deposited on t
hese substrates from a micropipette, are manipulated, transported, and subd
ivided into droplets as small as similar to7 nl by sequences of voltage app
lication and appropriate changes of electrode connections. The finite condu
ctivity of the water and the capacitance of the dielectric layer covering t
he electrodes necessitate use of rf voltage above similar to 60 kHz. A simp
le RC circuit model explains this frequency-dependent behavior. DEP actuati
on of small water volumes is very fast. We observe droplet formation in les
s than 0.1 s and transient, voltage-driven movement of water fingers at spe
eds exceeding 5 cm/s. Such speed suggests that actuation can be accomplishe
d using preprogrammed, short applications of the rf voltage to minimize Jou
le heating. (C) 2001 American Institute of Physics.