Wy. Shih et al., Simultaneous liquid viscosity and density determination with piezoelectricunimorph cantilevers, J APPL PHYS, 89(2), 2001, pp. 1497-1505
We have examined both experimentally and theoretically a piezoelectric unim
orph cantilever as a liquid viscosity-and-density sensor. The fabricated pi
ezoelectric unimorph consisted of a PbO . ZrO2. TiO2 (PZT) layer on a thin
stainless-steel plate. In addition to a driving electrode, a sensing electr
ode was placed on top of the PZT layer, permitting the direct measurement o
f the resonance frequency. The cantilever was tested using water-glycerol s
olutions of different compositions. In all three of the tested modes, the r
esonance frequency decreased while the width of the resonance peak increase
d with increasing glycerol content. To account for the liquid effect, we co
nsider the cantilever as a sphere of radius R oscillating in a liquid. By i
ncluding the high and low frequency terms in the induced mass and the dampi
ng coefficient of the liquid, we show that for a given liquid density and v
iscosity the oscillating-sphere model predicts a resonance frequency and pe
ak width that closely agree with experiment. Furthermore, the viscosity and
the density of a liquid have been determined simultaneously using the expe
rimentally measured resonance frequency and peak width as inputs to the osc
illating-sphere model. The calculated liquid viscosity and density closely
agreed with the known values, indicating that our cantilever-based sensor i
s effective in determining viscosity and density, simultaneously. We also s
how that scaling analysis predicts an increase in the width of the resonanc
e peak with decreasing cantilever size, an observation in agreement with th
e large peak widths observed for microcantilevers. (C) 2001 American Instit
ute of Physics.