Development of a 1 MV field-emission transmission electron microscope

Authors
Kawasaki, T Matsui, I Yoshida, T Katsuta, T Hayashi, S Onai, T Furutsu, T Myochin, K Numata, M Mogaki, H Gorai, M Akashi, T Kamimura, O Matsuda, T Osakabe, N Tonomura, A Kitazawa, K
Citation
T. Kawasaki et al., Development of a 1 MV field-emission transmission electron microscope, J ELEC MICR, 49(6), 2000, pp. 711-718
Citations number
18
Categorie Soggetti
Multidisciplinary
Journal title
JOURNAL OF ELECTRON MICROSCOPY
ISSN journal
00220744 → ACNP
Volume
49
Issue
6
Year of publication
2000
Pages
711 - 718
Database
ISI
SICI code
0022-0744(2000)49:6<711:DOA1MF>2.0.ZU;2-E
Abstract
We developed a 1 MV field-emission transmission electron microscope. This p aper reports details and specifications of the instrument. The microscope w as designed to obtain a bright and coherent electron beam by using the fiel d emission gun equipped with a pre-accelerating magnetic lens and the high voltage power supply with high stability (0.5 ppm min(-1)). Using this micr oscope, the brightness of 1.8x10(10) A cm(-2) sr(-1) and the lattice resolu tion of 49.8 pm were attained.