Electron moire method and its application to micro-deformation measurement

In this paper, the single and two deposited metal layers method were propos ed to produce the model grating for electron moire method. The measurement principle of electron moire method and the techniques for manufacturing mod el grid are expounded in detail. The accuracy of measuring strain using thi s method is discussed. The gratings with single deposited layer and two dep osited layers with high frequency up to 5000 lines/mm were produced on diff erent substrates. From the experimental results, both single deposited meta l layer and two deposited metal layers gratings showed their heat resistanc e ability. Using the gratings produced and a replicated model grid, the ele ctron moire method was applied to measure the deformation of the strain aro und holes in a polyimide resin substrate, thermal strain of electronic pack aging component and tensile creep around grain boundary in a pure copper sp ecimen. (C) 2000 Elsevier Science Ltd. All rights reserved.