Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope

We present dynamic plowing nanolithography on polymethylmethacrylate films, performed with a scan-linearized atomic force microscope able to scan up t o 250 mum with high resolution. Modifications of the surface are obtained b y plastically indenting the film surface with a vibrating tip. By changing the oscillation amplitude of the cantilever, i.e., the indentation depth, s urfaces can be either imaged or modified. A program devoted to the control of the scanning process is also presented. The software basically converts the gray scale of pixel images into voltages used to control the dither pie zo driving cantilever oscillations. The advantages of our experimental setu p and the dependence of lithography efficiency on scanning parameters are d iscussed. Some insights into the process of surface modifications are prese nted. (C) 2001 American Institute of Physics.