Design of W buffer layer for adhesion improvement of DLC films on tool steels

Citation
Kr. Lee et al., Design of W buffer layer for adhesion improvement of DLC films on tool steels, THIN SOL FI, 377, 2000, pp. 261-268
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
377
Year of publication
2000
Pages
261 - 268
Database
ISI
SICI code
0040-6090(200012)377:<261:DOWBLF>2.0.ZU;2-R
Abstract
Diamond-like carbon (DLC) has been a candidate for various applications due to its excellent tribological and mechanical properties. However, poor adh esion on tool steels limits its applications over a wide range. In the pres ent work, we investigated the effect of W and W-C intermediate layers on th e adhesion of DLC films to AISI D2 tool steels. The intermediate layers wer e deposited by de magnetron sputtering and the DLC films were deposited on the various intermediate layers by rf-PACVD. Adhesion of the DLC film was s ignificantly improved by introducing W and W-C intermediate layers. The adh esion was strongly dependent on the thickness of W layer and the CH4 fracti on in the sputtering gas during the intermediate layer deposition. TEM cros s section revealed that, in addition to the chemical compatibility between carbon and the intermediate layer materials, the microstructure of the inte rmediate layer is also important to improve the adhesion. Columnar grains o f the intermediate layers and structural continuity between the W and W-C m ixed layers were the significant factors affecting the adhesion of DLC film s. (C) 2000 Elsevier Science B.V. All rights reserved.