Effects of elevated temperatures and oxidation on residual stresses in (Ti,Al) coatings

Hard coatings are of wide interest for the improvement of the wear, corrosi on, and oxidation behavior of tools used in cutting and drilling processes, and in the molding of glass and polymer materials. In the present investig ation (Ti,Al)N-coatings were deposited in several sputtering processes by v ariation of deposition parameters. Residual film stresses were analyzed by measuring the deflection of the substrates in an interference microscope be fore and after the deposition. The dependence of thermally induced stresses on the temperature and also variations of the intrinsic stresses due to ch anges in the films could be studied, as well as inluences of oxidation on r esidual stresses.