Structural and vibrational characterization of hydrogenated carbon nitridethin films obtained by laser-induced CVD

Hydrogenated carbon nitride thin films were deposited on silicon substrates by laser-induced chemical vapor deposition (L-CVD) using an ArF excimer la ser (lambda = 193 nm) and different C2H2/NH3 gas mixtures. The surface and bulk compositions were obtained from X-ray photoelectron spectroscopy (XPS) and elastic recoil detection analysis (ERDA), respectively. FTIR spectrosc opy showed that the films contain mainly C=C and sp(2)/sp(3)C-N bonds. Vibr ational properties were also investigated by Raman spectroscopy in order to monitor the effect of the nitrogen incorporated in the deposited films. Th e relationships between the composition and chemical bond types were discus sed and referred to the deposition parameters. (C) 2000 Elsevier Science B. V. All rights reserved.