Excimer laser structuring of bulk polyimide material

A bulk polyimide system prepared by pressing of the precursor monomers 4,4' -oxidianiline (ODA) and 1,2,4,5-benzenetetracarboxylic or pyromellitic dian hydride (PMDA) mixtures has been investigated. The synthesized bulk polyimi de is formed as a result of a polycondensation reaction of monomers in soli d state phase. A change of the monomers polycrystalline structure to an amo rphous one of the bulk polyimide after imidization is established The possi bility for excimer laser microstructuring by drilling at various diameters and depths is demonstrated. The scanning electron microscopic observations reveal alterations in the so formed blind holes as a consequence of thr las er action parameters variation. The changes observed and the dependencies o btained are discussed. (C) 2000 Elsevier Science B.V. All rights reserved.