Combination of contour and half-tone masks used in laser ablation

Authors
Braun, A Zimmer, K Bigl, F
Citation
A. Braun et al., Combination of contour and half-tone masks used in laser ablation, APPL SURF S, 168(1-4), 2000, pp. 178-181
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
168
Issue
1-4
Year of publication
2000
Pages
178 - 181
Database
ISI
SICI code
0169-4332(200012)168:1-4<178:COCAHM>2.0.ZU;2-Y
Abstract
Excimer laser micro-machining has emerged as an important manufacturing pro cess for micro-sized mechanical and optical components Using the projection mask technique this work presents and evaluates a new type of mask capable of fabricating a variety of micro-structures with an improved surface qual ity. Details of the experimental procedure and the technical requirements a re discussed and examples of machined surfaces are presented. (C) 2000 Else vier Science B.V. All rights reserved.