W. Biegel et al., Pulsed laser deposition and characterization of perovskite thin films on various substrates, APPL SURF S, 168(1-4), 2000, pp. 227-233
Pulsed laser deposition (PLD) is a unique tool to grow high quality thin fi
lms of complex composition. In recent years it was demonstrated by several
groups that PLD is capable of depositing material ol er application relevan
t substrate sizes with good uniformity. In this contribution YBCO thin film
s and buffer layers were deposited by a special PLD setup on substrates as
large as 7 cm x 20 cm. For this purpose the UV laser light is focussed to a
n 8 cm Line on cylindrical targets while the substrate is scanned perpendic
ular to the line focus. Different kinds of substrates (SrTiO3, MgO, LaAlO3
and Sapphire) were coated with YBCO. Two important points of the presented
PLD-setup will be discussed in detail: the way of substrate heating and the
variation of the angle between the incident laser beam and the target surf
ace ('wobbling'). The structural and electrical properties of the deposited
YBCO thin films were investigated by X-ray diffraction (XRD) and inductive
measurements of the critical current density j(c). Furthermore, PLD was us
ed to deposit ferroelectric (Pb,La)(Zr,Ti)O-3 (PLZT) thin films on high-gra
de steel Hastelloy. This polycrystalline alloy is suitable as substrate and
electrode material as well. The deposited films were characterized with re
spect to their structural, topological and ferroelectric properties. (C) 20
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