A multifunctional laser linking and cutting structure for microelectronic circuits

Authors
Mende, O Niggemeyer, D
Citation
O. Mende et D. Niggemeyer, A multifunctional laser linking and cutting structure for microelectronic circuits, APPL SURF S, 168(1-4), 2000, pp. 280-283
Citations number
4
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
168
Issue
1-4
Year of publication
2000
Pages
280 - 283
Database
ISI
SICI code
0169-4332(200012)168:1-4<280:AMLLAC>2.0.ZU;2-4
Abstract
A novel laser-switch has been developed that unites a vertical link structu re and a fuse in a vertical arrangement. The structure has been designed an d fabricated in a standard three-level metal CMOS process and has been succ essfully verified. The area of the proposed linking and cutting structure i s 20% lower compared to a combination of conventional laser-link and fuse, and the processing time is reduced by up to 5%. The formed laser-links show a very low resistance (R-median = 1.7 Omega) Both linking and cutting stru ctures were processed with 100% yield. (C) 2000 Elsevier Science B.V. All r ights reserved.