Direct writing of conformal mesoscopic electronic devices by MAPLE DW

We demonstrate a novel pulsed UV laser direct writing technique called MAPL E DW for the fabrication of conformal electronic devices. MAPLE DW (matrix assisted pulsed laser evaporation direct write) is a soft laser forward tra nsfer technique that takes place in air and at room temperature. Specific e xperimental results for the deposition of Ag metal and BaTiO3 composite die lectrics with electrical quality comparable to conventional thick film depo sition techniques will be given as well as a discussion of the relevant iss ues for further electronic device improvement. The mechanism of the MAPLE D W process that makes it applicable to a broad class of electronic materials and even biomaterials is also described. Published by Elsevier Science B.V .