Novel optical material could mean sharper lithography

Authors
Mullins, J
Citation
J. Mullins, Novel optical material could mean sharper lithography, IEEE SPECTR, 38(1), 2001, pp. 25-27
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE SPECTRUM
ISSN journal
00189235 → ACNP
Volume
38
Issue
1
Year of publication
2001
Pages
25 - 27
Database
ISI
SICI code
0018-9235(200101)38:1<25:NOMCMS>2.0.ZU;2-7