Design, modeling, and control of a novel six DOF positioning system using magnetic levitation

The micro positioning systems using magnetic suspension technique, which is one of precision actuating method, have been suggested. Utilizing the vari ous potentials such as the exclusion of a mechanical friction, they are bei ng applied broadly to multi degrees of freedom (d.o.f) system requesting hi gh accuracy or hybrid system requesting to be controlled position and force simultaneously. This paper presents the entire development procedure of a novel six d.o.f. micro positioning system using magnetic levitation, with a repulsive force mechanism covering the all d.o.f. First, the interactions between magnetic elements are modeled and the system design flow by an opti mal location of the elements is given. A kinematic relationship between the measuring instruments and the levitated object is derived, and dynamic cha racteristics are identified by the narrow gap principles. And the main issu es for control are discussed.