Computation of capacitance matrix for integrated circuit interconnects using semi-analytic Green's function method

In this paper a method for computing the capacitance matrix of a multicondu ctor interconnect line in a multilayered dielectric region is presented. Th e number of conductors and dielectric layers are arbitrary. The conductors are infinitesimally thin, and can be placed anywhere in the structure. The formulation is obtained by using a semi-analytic Green's function for multi layer structures, which is integrated to a series expansion, valid for unif orm charge distribution on the conductors. In addition, the quasi-analytica l evaluation of the entries of the Galerkin matrix leads to a very efficien t and accurate computer code. Computed results are given for some cases of the integrated circuit interconnects to show the advantages and simplicity of our procedure as compared to the methods available in the literature. (C ) 2000 Elsevier Science B.V. All rights reserved.