M. Fujimoto et al., Critical dimension controllability evaluation based on process error distribution for 150 nm devices, JPN J A P 1, 38(12B), 1999, pp. 6963-6967
In this study, the critical dimension (CD) controllability of 150 nm patter
ns was evaluated by aerial image simulation. We considered three types of p
rocess errors (dose errors, focus errors, and mask CD errors) and evaluated
the CD error distribution by calculaling both the CD and the probability f
or each of the various combinations of process errors. The effects of high
numerical-aperture (NA) KrF exposure on CD controllability were investigate
d in detail. In contact hole patterns and line patterns with various pitche
s, the CD controllability was significantly improved by increasing the NA,
up to about 0.72. However, NA of more than 0.72 does not seem to have furth
er significant effects on the CD controllability. We also investigated the
CD controllability in ArF exposure. ArF exposure is expected to exhibit bet
ter CD controllability for contact hole patterns and line patterns with var
ious pitches, even under lower NA conditions than KrF exposure.