In the conventional procedure for fabricating binary optical elements (BOEs
), we ascertained, by optical simulation, that the alignment error is a pri
ncipal factor in diffraction efficiency. To deal with this problem we have
developed a novel self-aligned procedure, and we have fabricated BOEs with
high diffraction efficiency. The key point of the novel procedure is that e
very step of the element is determined by the first Cr hard mask. To achiev
e this, we used a negative photoresist with back exposure. We fabricated fo
ur-level BOEs, and the diffraction efficiency of the BOEs is only 3% below
the theoretical value. Furthermore, we investigated the influence of the re
maining fabrication error in the novel method. The remaining error consists
of the etching depth error and critical dimension (CD) error. According to
the optical simulation, the CD error negligibly affects the diffraction ef
ficiency. The only factor we should consider is the etching depth error.