Combined out-of-plane and in-plane texture control in thin films using ionbeam assisted deposition

Complete control of the texture of a film during growth requires the abilit y to determine the in-plane and out-of-plane texture simultaneously. We pre sent both computer simulation and experimental evidence for the simultaneou s establishment of out-of-plane and in-plane texture during ion beam assist ed deposition of aluminum. Channeling along (110) directions (60 degrees fr om the normal) creates a {220} out-of-plane orientation rather than the the rmodynamically preferred {111} orientation. The ion beam also aligned (220) directions within the plane of the film. Measured x-ray pole figures confi rmed the presence of a strong out-of-plane texture and the presence of two main, twin-related, in-plane texture components. We theoretically demonstra ted that it is impossible to completely control both the in-plane and out-o f-plane texture with a single ion beam in high-symmetry crystals and two io n beams must be employed to ensure complete texture control.