Ja. Gonzalez et al., Study of the effects of low-energy electron bombardment during the chemical vapor deposition of diamond, J MATER RES, 16(1), 2001, pp. 293-295
The effects of low-energy electron bombardment during the chemical vapor de
position of diamond were studied. The film growth was monitored in real tim
e with in situ phase-modulated ellipsometry, in order to trigger the electr
on bombardment at different growth stages. Ex situ Raman spectroscopy and s
canning electron microscopy were employed to evaluate the crystalline quali
ty and the morphology of the grown films, respectively. The results indicat
ed that triggering the electron bombardment after high-quality scattered di
amond crystallites had formed results in finely grained smoother films of s
imilar diamond yield and crystalline quality as those grown without bombard
ment. However, the electron bombardment deteriorates the film crystalline q
uality and the diamond yield when it was triggered from the start of deposi
tion.