Yk. Lee et al., Study of interfacial reactions in ionized metal plasma (IMP) deposited Al-0.5%wt Cu/Ti/SiO2/Si structure, J MATER SCI, 35(23), 2000, pp. 5857-5860
Interfacial reactions in Al-0.5%wtCu/Ti/SiO2/Si structure have been investi
gated up to the annealing temperature of 600 degreesC for 30 min in Argon a
mbient. Annealing temperature at above 500 degreesC, Al alloy and Ti start
to react and produce Al3Ti, which was already reported. Annealing at higher
temperatures (550 degreesC, and 600 degreesC) made Al3Ti transformed into
Al5Ti2, which is thermodynamically more stable than Al3Ti. The unreacted 52
nm thick Ti which existed underneath of Al5Ti2 might lead to retardation o
f the reaction between Al5Ti2 and the underlying SiO2. Hence, the formation
of ternary compound (AlxTiySiz) which is believed to be detrimental to the
contact metallization layers was protected. (C) 2000 Kluwer Academic Publi
shers.