Atmospheric pressure atomic layer epitaxy of ZnO on a sapphire (0001) substrate by alternate reaction of ZnCl2 and O-2

Authors
Kaiya, K Yoshii, N Takahashi, N Nakamura, T
Citation
K. Kaiya et al., Atmospheric pressure atomic layer epitaxy of ZnO on a sapphire (0001) substrate by alternate reaction of ZnCl2 and O-2, J MAT SCI L, 19(23), 2000, pp. 2089-2090
Citations number
4
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
02618028 → ACNP
Volume
19
Issue
23
Year of publication
2000
Pages
2089 - 2090
Database
ISI
SICI code
0261-8028(200012)19:23<2089:APALEO>2.0.ZU;2-S