We studied the phase equilibrium of carbon which holds the hydrogen-adsorbe
d surface at low pressure. All of the molecules in a chamber of a finite vo
lume are assumed to be fully decomposed so that the system is considered to
be a mixture of atomic hydrogen and carbon vapor with a crystalline carbon
. The equilibrium conditions are characterized by the same chemical potenti
als for both phases of each ingredient. The phase boundary of a two-dimensi
onal solid with a smaller bond strength is separable from that of a three-d
imensional solid with a larger bond strength. The covering ratio of hydroge
n atoms on the surface was also calculated and turns out to be larger for a
two-dimensional solid.