Combinatorial methods involving data collection in multiparameter space all
ow a rapid identification of measured property trends as a function of syst
em parameters. The technique has been applied with success to pharmaceutica
l, inorganic and organic materials synthesis, but not significantly to meas
urements of polymeric films and coatings. We demonstrate the use of 2-D com
binatorial libraries to investigate thin-film dewetting. We have prepared l
ibraries of thin films of polystyrene on silicon substrates containing orth
ogonal, continuous variations of thickness (h), and temperature (T) that re
present about 1200 practical state points per library. The libraries were s
creened for dewetting behavior using automated optical microscopy. Dewettin
g trends were visibly apparent on the libraries, and a comprehensive map of
the T, h, and time (t) dependence was generated in a few hours. The combin
atorial libraries, spanning a large T, h, and t range, not only reproduced
known dewetting structures and phenomena but also enabled a novel T, h supe
rposition of the heterogeneous nucleated hole dewetting kinetics. We observ
ed three hole nucleation regimes as a function of thickness: heterogeneousl
y nucleated holes (h > 55 nm), a crossover regime where both heterogeneous
and capillary instability nucleation compete (33 nm < h < 55 nm), and a reg
ime of holes nucleated by capillary instability (16 nm < h < 33 nm).