J. Akedo, Study on rapid micro-structuring using Jet molding - Present status and structuring properties toward HARMST, MICROSYST T, 6(6), 2000, pp. 205-209
Ultra-fine particles of metal and ceramic materials jetting with the veloci
ties of several hundreds m/s is accumulated on the substrate based on impac
t adhesion. Recently, the application of this phenomenon for micro electro
mechanical systems and micro devise has been investigated. In this paper, t
he deposition method based on ultra-fine particle beam and possibilities of
its application as HARMST are reported.