Study on rapid micro-structuring using Jet molding - Present status and structuring properties toward HARMST

Authors
Akedo, J
Citation
J. Akedo, Study on rapid micro-structuring using Jet molding - Present status and structuring properties toward HARMST, MICROSYST T, 6(6), 2000, pp. 205-209
Citations number
10
Categorie Soggetti
Instrumentation & Measurement
Journal title
MICROSYSTEM TECHNOLOGIES
ISSN journal
09467076 → ACNP
Volume
6
Issue
6
Year of publication
2000
Pages
205 - 209
Database
ISI
SICI code
0946-7076(200011)6:6<205:SORMUJ>2.0.ZU;2-W
Abstract
Ultra-fine particles of metal and ceramic materials jetting with the veloci ties of several hundreds m/s is accumulated on the substrate based on impac t adhesion. Recently, the application of this phenomenon for micro electro mechanical systems and micro devise has been investigated. In this paper, t he deposition method based on ultra-fine particle beam and possibilities of its application as HARMST are reported.