We have investigated conductance fluctuations due to tunneling through impu
rity states in the quantum well of a double-barrier resonant tunneling devi
ce. The impurity States are donor-related and are associated with a low-den
sity Si delta -doping layer incorporated into the center plane of the quant
um well. At constant temperature, the relative amplitude of the conductance
fluctuations is determined by the absolute number of donor impurities in t
he well and is found to scale, as (SNd)(-1/2), where N-d is the areal densi
ty of donor atoms in the well, and S is the area of the device. The typical
voltage period of the fluctuations is determined by the larger of kT or th
e natural linewidth of the state. There is excellent quantitative agreement
between the experimental results and an existing theoretical model for con
ductance fluctuations in this type of system.