Surface diffusion-induced smoothing of features below the roughening temper
ature is discussed using kinetic Monte Carlo simulations and a continuum de
scription is developed. Rounding off the cusp in the surface free energy at
low Miller index orientations permits a numerical solution of relaxation d
riven by surface diffusion. For both unidirectional and bidirectional sinus
oidal profiles of wavelength L, the amplitude decays linearly with time and
the decay time scales as L-3. Surface morphology evolution below the rough
ening temperature as described by the continuum equation and a step model a
re compared.