In this payer, the preparation of amorphous silicon carbide with very wide
optical band gap and high conductivity were reported. The films were fabric
ated under the "silane-plasma starving" and H-2 dilution condition in conve
ntional capacitively coupled reactors. The silane-plasma starving condition
and H-2 dilution play important roles in decreasing H content, modulating
the material toward the ordered structure and enhancing the doping ratio. T
his is an easy way to prepare wide optical band gap and highly conductive p
-type window layers for a-Si:H-based solar cells. (C) 2001 Elsevier Science
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