Role of hydrogen in hydrogenated microcrystalline silicon

Authors
Itoh, T Yamamoto, K Harada, H Yamana, N Yoshida, N Inouchi, H Nonomura, S Nitta, S
Citation
T. Itoh et al., Role of hydrogen in hydrogenated microcrystalline silicon, SOL EN MAT, 66(1-4), 2001, pp. 239-244
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
SOLAR ENERGY MATERIALS AND SOLAR CELLS
ISSN journal
09270248 → ACNP
Volume
66
Issue
1-4
Year of publication
2001
Pages
239 - 244
Database
ISI
SICI code
0927-0248(200102)66:1-4<239:ROHIHM>2.0.ZU;2-G
Abstract
The integrated intensity of the IR absorption mode near 640 cm(-1) is direc tly proportional to hydrogen density while that around 2000-2100 cm(-1) is not proportional to this. The crystallinity of a sample prepared by hot-wir e assisted PECVD (HWAPECVD) is higher than that by PECVD. The hydrogen dens ity of a sample prepared by HWAPECVD is smaller than that by PECVD. The mod e near 840cm(-1) in IR absorption spectrum for a sample prepared by HWAPECV D is smaller than that by PECVD. The properties and the role of hydrogen in muc-Si:H are discussed. (C) 2001 Elsevier Science B.V. All rights reserved .