S. Goto et al., Improvement in photovoltaic conversion efficiency of InGaP solar cells grown on Si substrate by thermal cleaning using Si2H6, SOL EN MAT, 66(1-4), 2001, pp. 631-636
A new type of thermal cleaning for Si surfaces, using Si2H6, has been devel
oped for growing GaAs buffer layers with an A-step surface on an Si substra
te by metaloraganic vapor-phase epitaxy (MOVPE). This process made it possi
ble, for the first time, to grow an A-step surface InGaP solar cell structu
re on an Si substrate with good surface morphology. An improvement in photo
voltaic conversion efficiency has been achieved by this newly developed pro
cess. (C) 2001 Elsevier Science B.V. All rights reserved.