QUALITY IMPROVEMENT OF SUPERCONDUCTING THIN-FILMS THROUGH DESIGNED EXPERIMENT

This article describes work on a research project using designed exper imental methods to improve the quality of superconducting thin films. Nine deposition experiments were conducted to study four parameters-O- 2 flow rate, N2O flow rate, Ar flow rate and precursor oven temperatur e-each with three levels, to decide the optimum setting of system fact ors. Three confirmation tests indicated that the critical current dens ity J(c) was improved from 1.0 x 10(6) amp/cm(2) to 3-5 x 10(6) amp/cm (2). Relations among key factors have been explored in addition to reg ular ANOVA. These relations can prove to be useful in understanding su perconductivity behavior and for measuring J(c) with nondestructive me thods.