Self-consistent particle modelling of plasma-solid interaction: influence of negative ions

Authors
Hrach, R Hrachova, V
Citation
R. Hrach et V. Hrachova, Self-consistent particle modelling of plasma-solid interaction: influence of negative ions, VACUUM, 60(1-2), 2001, pp. 229-233
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
VACUUM
ISSN journal
0042207X → ACNP
Volume
60
Issue
1-2
Year of publication
2001
Pages
229 - 233
Database
ISI
SICI code
0042-207X(200101/02)60:1-2<229:SPMOPI>2.0.ZU;2-S
Abstract
In this contribution, the transport of electrons and ions to metal substrat es in low-temperature plasma is studied by computer simulation. The main go al of modelling was to analyse the changes in distributions of charged part icles during their transport through both the pre-sheath and the sheath nea r the substrate. Further results concern the influence of negative ions in the plasma and the influence of pressure on the potential and space-charge distributions in the vicinity of substrates. (C) 2001 Elsevier Science Ltd. All rights reserved.