Spectroscopic analysis of ceramics erosion by radiofrequency magnetron

This paper reports work which was undertaken to control the ceramics sputte ring by using optical emission spectroscopy. Detection of erosion of BN-SiO 2 sample was analysed in a RF magnetron discharge working in Argon. Typical emission lines were detected in the U.V. and V.U.V domains. The variations of the intensities of these lines, including molecular radical Lines, were then studied versus the time for a pulsed discharge and versus the RF powe r injected in the plasma.