J. Kawanaka et al., 134 nm vacuum ultraviolet emission using an Ar/Kr gas mixture excited by aquasi-continuous-wave gas jet discharge, APP PHYS B, 72(2), 2001, pp. 179-182
We have developed a vacuum ultraviolet (VUV) lamp at 134 nm with a quasi-po
int emission geometry using a quasi-continuous-wave (cw) gas jet discharge
of an Ar/Kr gas mixture. We have unambiguously identified a new emission co
ntinuum centered at 134 nm as a transition of Ar-Kr hetero-nuclear excimers
(ArKr*). The VUV emission power of the 134 nm continuum was 10 mW at 21 at
m of the total Ar/Kr stagnation gas pressure, at a Kr concentration of 0.1%
. Characteristic energy transfer between atoms and dimers plays an importan
t role for the efficient production of ArKr* in such a gas jet discharge.