STRUCTURAL AND ELECTRICAL-PROPERTIES OF BATIO3 THIN-FILMS ON SI(100) SUBSTRATE BY HYDROTHERMAL SYNTHESIS

Crack-free, dense, polycrystalline BaTiO3 thin films have been synthes ized on the Ti-deposited Si(100) substrates with various alkaline solu tions of barium salts in the temperature range from 150 degrees C to 2 80 degrees C by hydrothermal method. The fabricated BaTiO3 thin films were found to have good adhesion on the substrate. The structural prop erties of thin films were investigated by X-ray diffraction (XRD) meas urements. It was discussed about the crystallinity, surface morphology and interfaces of the resultant films depending on the reaction condi tions such as time, temperature and solution. The thickness of the fil ms increased with increasing temperature and time of reaction. The die lectric constants and the loss factor of thin film were measured in th e frequency range from 100 Hz to 1 MHz at room temperature.